Highly angular dependent high-contrast grating mirror and its application for transverse-mode control of VCSELs

Highly angular dependent high-contrast grating mirror and its application for transverse-mode control of VCSELs

We report on the design and fabrication of a highly angular dependent high contrast grating (HCG) mirror. The modeling and experiment on amorphous-Si/SiO2 HCG clearly show the large angular dependence of reflectivity, which enables single transverse-mode operations of large-area VCSELs. We fabricate...

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Veröffentlicht in:Japanese Journal of Applied Physics 2014-09, Vol.53 (9), p.90306-1-090306-4
Hauptverfasser: Inoue, Shunya, Kashino, Junichi, Matsutani, Akihiro, Ohtsuki, Hideo, Miyashita, Takahiro, Koyama, Fumio
Format: Artikel
Sprache:eng
Schlagworte:
Devices
Frequency filters
Multilayers
Reflectivity
Semiconductors
Silicon dioxide
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Beschreibung
Zusammenfassung:We report on the design and fabrication of a highly angular dependent high contrast grating (HCG) mirror. The modeling and experiment on amorphous-Si/SiO2 HCG clearly show the large angular dependence of reflectivity, which enables single transverse-mode operations of large-area VCSELs. We fabricate 980 nm VCSELs with the angular dependent HCG functioning as a spatial frequency filter. We obtained the single transverse mode operation of the fabricated device in contrast to conventional VCSELs with semiconductor multilayer mirrors.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.53.090306