Homogeneous Al 2 O 3 Multilayered Films Deposited on Poly(ethylene terephthalate) by Facing-Target Sputtering System for Thin-Film Passivation of Organic Light-Emitting Diodes
Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive processes using Al 2 O 3 with the facing-target sputtering (FTS) system. The multilayered films showed 60% improved barrier performance and their fabrication was 30% faster than that of single Al 2 O 3 layers...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 2013-12, Vol.52 (12R), p.126201 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive processes using Al
2
O
3
with the facing-target sputtering (FTS) system. The multilayered films showed 60% improved barrier performance and their fabrication was 30% faster than that of single Al
2
O
3
layers of the same thickness. The water vapor transmission rate was increased up to the order of 10
-4
g·m
-2
·d
-1
from a three-pair system of reactive and nonreactive sputtered Al
2
O
3
bilayers. |
|---|---|
| ISSN: | 0021-4922 1347-4065 |
| DOI: | 10.7567/JJAP.52.126201 |