Nanoimprint Fabrication and Thermal Behavior of Atomically Ultrasmooth Glass Substrates with 0.2-nm-Height Steps

Nanoimprint Fabrication and Thermal Behavior of Atomically Ultrasmooth Glass Substrates with 0.2-nm-Height Steps

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Veröffentlicht in:Japanese Journal of Applied Physics 2011-07, Vol.50 (7R), p.78002
Hauptverfasser: Miyake, Yumiko, Akita, Yasuyuki, Oi, Hideo, Mita, Masahiro, Kaneko, Satoru, Koyama, Kohji, Sunagawa, Kazuhiko, Tada, Kazuhiro, Hirai, Yoshihiko, Yoshimoto, Mamoru
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container_issue 7R
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container_title Japanese Journal of Applied Physics
container_volume 50
creator Miyake, Yumiko
Akita, Yasuyuki
Oi, Hideo
Mita, Masahiro
Kaneko, Satoru
Koyama, Kohji
Sunagawa, Kazuhiko
Tada, Kazuhiro
Hirai, Yoshihiko
Yoshimoto, Mamoru
description
doi_str_mv 10.7567/JJAP.50.078002
format Article
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title Nanoimprint Fabrication and Thermal Behavior of Atomically Ultrasmooth Glass Substrates with 0.2-nm-Height Steps
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