The Polishing Effect of ZnO Thin Films on SAW Filters

The Polishing Effect of ZnO Thin Films on SAW Filters

SAW filters in a structure of ZnO/IDT/glass, have periodic convex and concave roughness on the surface of ZnO thin films which is caused by IDT electrodes. This investigation reports that the convex and concave roughness affects the SAW velocity, and mechanical polishing of the ZnO thin films has gr...

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Veröffentlicht in:Japanese Journal of Applied Physics 1990-01, Vol.29 (S1), p.159
Hauptverfasser: Kadota, Michio, Kondo, Chikashi, Ikeda, Toshiaki, Kasanami, Tohru
Format: Artikel
Sprache:eng
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Zusammenfassung:SAW filters in a structure of ZnO/IDT/glass, have periodic convex and concave roughness on the surface of ZnO thin films which is caused by IDT electrodes. This investigation reports that the convex and concave roughness affects the SAW velocity, and mechanical polishing of the ZnO thin films has great effect on SAW filter frequency characteristics.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAPS.29S1.159