A Laser Scanner Using Stacked Piezoelectric Ceramic Actuator

A Laser Scanner Using Stacked Piezoelectric Ceramic Actuator

A laser scanner using the displacement of two stacked piezo-electric ceramic actuators (Piezo-Stacks) has been developed. This scanner is capable of simultaneously scanning both X and Y axes up to 4.0 mrad at frequencies as high as 1.0 kHz. Possible uses include automated precise positioning of opti...

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Veröffentlicht in:Japanese Journal of Applied Physics 1986-01, Vol.25 (S1), p.223, Article 223
Hauptverfasser: Okuda, Makoto, Wakita, Naomasa, Ohya, Kanji, Banno, Hisao, Hattori, Shuzo
Format: Artikel
Sprache:eng
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Zusammenfassung:A laser scanner using the displacement of two stacked piezo-electric ceramic actuators (Piezo-Stacks) has been developed. This scanner is capable of simultaneously scanning both X and Y axes up to 4.0 mrad at frequencies as high as 1.0 kHz. Possible uses include automated precise positioning of optics and lasers for LSI applications.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAPS.25S1.223