Vertical and Longitudinal Multilayer Graphene Growth Using Novel Heat-Beam-Assisted Chemical Vapor Deposition

A vertical and longitudinal multilayer graphene sheet was grown on a substrate by catalytic chemical vapor deposition (CVD). For the CVD, we used a novel annealing method called "heat beam (HB)", in which high-temperature inert gas is blown directly onto the chip surface in an inert-gas-flow chamber, and a safe and chemically stable "diethylacetylene" as a hydrocarbon source. The advantages of HB-CVD include not only a steep temperature-depth profile but also better scalability for mass production, such as with roll-to-roll systems. We investigate the crystalline quality and structure of HB-CVD-grown graphene by Raman spectroscopy and transmission electron microscopy.