HF-HNO3-H2SO4/H2O Mixtures for Etching Multicrystalline Silicon Surfaces: Formation of NO2+, Reaction Rates and Surface Morphologies
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| Veröffentlicht in: | Zeitschrift für Naturforschung. B, A journal of chemical sciences A journal of chemical sciences, 2011-02, Vol.66, p.155 |
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| container_title | Zeitschrift für Naturforschung. B, A journal of chemical sciences |
| container_volume | 66 |
| creator | Lippold, M. Patzig-Klein, S. Kroke, E. |
| description | |
| doi_str_mv | 10.5560/ZNB.2011.66b0155 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0932-0776 |
| ispartof | Zeitschrift für Naturforschung. B, A journal of chemical sciences, 2011-02, Vol.66, p.155 |
| issn | 0932-0776 |
| language | eng |
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| source | Alma/SFX Local Collection |
| title | HF-HNO3-H2SO4/H2O Mixtures for Etching Multicrystalline Silicon Surfaces: Formation of NO2+, Reaction Rates and Surface Morphologies |
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