Characterisation of Thin Films Using a Coherence Scanning Interferometry
Gespeichert in:
| Veröffentlicht in: | Journal of materials science and chemical engineering 2015, Vol.3 (1), p.15-21 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 21 |
|---|---|
| container_issue | 1 |
| container_start_page | 15 |
| container_title | Journal of materials science and chemical engineering |
| container_volume | 3 |
| creator | Yu, Yang Mansfield, Daniel |
| description | |
| doi_str_mv | 10.4236/msce.2015.31003 |
| format | Article |
| fullrecord | <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_4236_msce_2015_31003</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_4236_msce_2015_31003</sourcerecordid><originalsourceid>FETCH-LOGICAL-c1273-b2cbcb9ac7e88c5b19eab6178d49cc65d0a1d98ecd16c2d0177cd69bee486f163</originalsourceid><addsrcrecordid>eNo9kD1rwzAYhEVpoSHN3FV_wIm-ZY_FNE0gkKHJLOTXr2uVWC6Sl_z7xm3pLXcc3A0PIc-crZWQZjNkwLVgXK8lZ0zekYWQwhaGaXn_n5V-JKucP9lNpTFaqQXZ1b1PHiZMIfspjJGOHT31IdJtuAyZnnOIH9TTeuwxYQSk7-BjnMt9vK06TOOAU7o-kYfOXzKu_nxJztvXU70rDse3ff1yKIALK4tGQANN5cFiWYJueIW-MdyWraoAjG6Z521VIrTcgGgZtxZaUzWIqjQdN3JJNr-_kMacE3buK4XBp6vjzM0s3MzCzSzcDwv5DefoU44</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Characterisation of Thin Films Using a Coherence Scanning Interferometry</title><source>Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals</source><creator>Yu, Yang ; Mansfield, Daniel</creator><creatorcontrib>Yu, Yang ; Mansfield, Daniel</creatorcontrib><identifier>ISSN: 2327-6045</identifier><identifier>EISSN: 2327-6053</identifier><identifier>DOI: 10.4236/msce.2015.31003</identifier><language>eng</language><ispartof>Journal of materials science and chemical engineering, 2015, Vol.3 (1), p.15-21</ispartof><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c1273-b2cbcb9ac7e88c5b19eab6178d49cc65d0a1d98ecd16c2d0177cd69bee486f163</citedby><cites>FETCH-LOGICAL-c1273-b2cbcb9ac7e88c5b19eab6178d49cc65d0a1d98ecd16c2d0177cd69bee486f163</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,4009,27902,27903,27904</link.rule.ids></links><search><creatorcontrib>Yu, Yang</creatorcontrib><creatorcontrib>Mansfield, Daniel</creatorcontrib><title>Characterisation of Thin Films Using a Coherence Scanning Interferometry</title><title>Journal of materials science and chemical engineering</title><issn>2327-6045</issn><issn>2327-6053</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><recordid>eNo9kD1rwzAYhEVpoSHN3FV_wIm-ZY_FNE0gkKHJLOTXr2uVWC6Sl_z7xm3pLXcc3A0PIc-crZWQZjNkwLVgXK8lZ0zekYWQwhaGaXn_n5V-JKucP9lNpTFaqQXZ1b1PHiZMIfspjJGOHT31IdJtuAyZnnOIH9TTeuwxYQSk7-BjnMt9vK06TOOAU7o-kYfOXzKu_nxJztvXU70rDse3ff1yKIALK4tGQANN5cFiWYJueIW-MdyWraoAjG6Z521VIrTcgGgZtxZaUzWIqjQdN3JJNr-_kMacE3buK4XBp6vjzM0s3MzCzSzcDwv5DefoU44</recordid><startdate>2015</startdate><enddate>2015</enddate><creator>Yu, Yang</creator><creator>Mansfield, Daniel</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>2015</creationdate><title>Characterisation of Thin Films Using a Coherence Scanning Interferometry</title><author>Yu, Yang ; Mansfield, Daniel</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1273-b2cbcb9ac7e88c5b19eab6178d49cc65d0a1d98ecd16c2d0177cd69bee486f163</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Yu, Yang</creatorcontrib><creatorcontrib>Mansfield, Daniel</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of materials science and chemical engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yu, Yang</au><au>Mansfield, Daniel</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Characterisation of Thin Films Using a Coherence Scanning Interferometry</atitle><jtitle>Journal of materials science and chemical engineering</jtitle><date>2015</date><risdate>2015</risdate><volume>3</volume><issue>1</issue><spage>15</spage><epage>21</epage><pages>15-21</pages><issn>2327-6045</issn><eissn>2327-6053</eissn><doi>10.4236/msce.2015.31003</doi><tpages>7</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 2327-6045 |
| ispartof | Journal of materials science and chemical engineering, 2015, Vol.3 (1), p.15-21 |
| issn | 2327-6045 2327-6053 |
| language | eng |
| recordid | cdi_crossref_primary_10_4236_msce_2015_31003 |
| source | Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals |
| title | Characterisation of Thin Films Using a Coherence Scanning Interferometry |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-25T11%3A14%3A58IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Characterisation%20of%20Thin%20Films%20Using%20a%20Coherence%20Scanning%20Interferometry&rft.jtitle=Journal%20of%20materials%20science%20and%20chemical%20engineering&rft.au=Yu,%20Yang&rft.date=2015&rft.volume=3&rft.issue=1&rft.spage=15&rft.epage=21&rft.pages=15-21&rft.issn=2327-6045&rft.eissn=2327-6053&rft_id=info:doi/10.4236/msce.2015.31003&rft_dat=%3Ccrossref%3E10_4236_msce_2015_31003%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |