Properties of Titanium Oxynitride Prepared by RF Plasma

Properties of Titanium Oxynitride Prepared by RF Plasma

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Veröffentlicht in:Advances in chemical engineering and science 2015, Vol.5 (1), p.1-14
Hauptverfasser: El-Hossary, Fayez M., Negm, Niemat Z., Abd El-Rahman, Ahmed M., Raaif, Mohamed, Abd Elmula, Alzahraa A.
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container_title Advances in chemical engineering and science
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creator El-Hossary, Fayez M.
Negm, Niemat Z.
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Abd Elmula, Alzahraa A.
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doi_str_mv 10.4236/aces.2015.51001
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title Properties of Titanium Oxynitride Prepared by RF Plasma
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