MEMS Piezoresitive cantilever mass sensor response for detection of volatile organic compounds using Omnicant experimental platform

MEMS piezoresitive cantilever is a system that is utilized to identify VOC molecules like acetone, ethanol, isopropyl and ethyl acetate. These molecules have molecular weights ranging from 46.07gms/mole to 88.1gms/mole. These molecules can be identified due to the deflection changes of the cantileve...

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Veröffentlicht in:International journal of recent technology and engineering 2019-09, Vol.8 (3), p.1387-1390
Hauptverfasser: Aparna, K.Durga, Koti Reddy, Prof.D.V.Rama, kumar, Dr.B.Rajesh
Format: Artikel
Sprache:eng
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Zusammenfassung:MEMS piezoresitive cantilever is a system that is utilized to identify VOC molecules like acetone, ethanol, isopropyl and ethyl acetate. These molecules have molecular weights ranging from 46.07gms/mole to 88.1gms/mole. These molecules can be identified due to the deflection changes of the cantilever when the change in the mass occurs due to the deposition of molecules on the cantilever. Thus in this paper the responses from the piezoresistive micro cantilever with different analytes using OMNICANT were obtained.
ISSN:2277-3878
2277-3878
DOI:10.35940/ijrte.B3540.098319