High sensitive vector measurement of nonlinear harmonic responses in surface acoustic wave/bulk acoustic wave radio frequency devices

This paper proposes a high-sensitive measuring method for nonlinear harmonic responses in radio frequency (RF) SAW/BAW devices using a lock-in amplifier. The proposed system could detect the nonlinear complex harmonic responses generated in an RF SAW resonator, even if the responses are weaker than −140 dBm. The detection limit is extended by around 10 dB compared with the conventional technique using a cross-domain analyzer.