Evaluation of The Mechanical Properties of The Multilayered Films by Nanoindentation at a Penetration Depth as small as 10nm

In nanometer order nanoindentation test, roundness or truncation of the indenter tip cannot be avoided. In this paper, we analyzed the indentation problem of a rounded triangular indentation into a layered elastic half-space by a finite element analysis, and then established a method to estimate the intrinsic elastic modulus of the film from the nanoindentation data. The method was demonstrated by the nanoindentation test with a less than 10nm penetration depth on a 10nm thick diamond-like carbon film deposited on a 50nm thick magnetic layer.