Magnetic Properties of Fe-Co-Ti Films Sputtered in a Mixed Ar+N2

Sputtered Fe, Fe97.5Ti2.5Fe97.5-xCo2.5Tix (2.5≤ x ≤ 10) films in a mixed Ar and N2 gas atmosphere were studied in order to determine the dependence of their soft magnetic properties on the N2/(Ar+N2) flow ratio and composition.After annealing at 573 K for 1 h, the permeabilities of Fe97.5Ti2.5 and F...

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Veröffentlicht in:	Journal of the Magnetics Society of Japan 1996/04/01, Vol.20(2), pp.481-484
Hauptverfasser:	Sato, F., Miyazaki, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Fe Fe97.5-xCo2.5Tix (2.5 ≤x≤ 10) Fe97.5Ti2.5 grain size high saturation flux density initial permeability lattice constant mixed Ar and N2 gas atmosphere thin films
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Zusammenfassung:	Sputtered Fe, Fe97.5Ti2.5Fe97.5-xCo2.5Tix (2.5≤ x ≤ 10) films in a mixed Ar and N2 gas atmosphere were studied in order to determine the dependence of their soft magnetic properties on the N2/(Ar+N2) flow ratio and composition.After annealing at 573 K for 1 h, the permeabilities of Fe97.5Ti2.5 and Fe87.5Co2.5Ti10 films were more than 1000, while the corresponding saturation magnetic flux density was about 20 kG. The permeability change in with the N2/(Ar+N2) flow ratio is discussed in relation to the grain size and lattice strain.
ISSN:	0285-0192 1880-4004
DOI:	10.3379/jmsjmag.20.481