Anisotropic Fe-N/Co-Zr-Nb Soft Magnetic Multilayer Films
The purpose of this study is to obtain a soft magnetic film with high saturation flux density Bs and permeability μ and controllable uniaxial anisotropy. Making a multilayer structure using Fe-N for which Bs is close to that of pure Fe and Co-Zr-Nb, a soft magnetic film having Bs∼19 kG, Hc≤0.3 Oe Hc...
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Veröffentlicht in: | Journal of the Magnetics Society of Japan 1994, Vol.18(S_1_PMRC_94_1), pp.S1_191-194 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The purpose of this study is to obtain a soft magnetic film with high saturation flux density Bs and permeability μ and controllable uniaxial anisotropy. Making a multilayer structure using Fe-N for which Bs is close to that of pure Fe and Co-Zr-Nb, a soft magnetic film having Bs∼19 kG, Hc≤0.3 Oe Hc and μi≥3300 at 1 MHz was obtained. This film retains the soft magnetic properties up to 450C, and the μi at 1 MHz annealed at 250C is greater than 4000. The uniaxial anisotropy field Hk in the range of 4 to 7 Oe can be induced by annealing while retaining the soft magnetic properties. |
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ISSN: | 0285-0192 1880-4004 |
DOI: | 10.3379/jmsjmag.18.S1_191 |