SOFT MAGNETIC PROPERTIES AND THERMAL STABILITY OF Fe/(Al, Ti, Ta, Cn, Ag) MULTILAYERED FILMS

SOFT MAGNETIC PROPERTIES AND THERMAL STABILITY OF Fe/(Al, Ti, Ta, Cn, Ag) MULTILAYERED FILMS

This paper presents experimental studies of soft magnetic properties and thermal stabilities for compositionally modulated multilayer films consisting of pure Fe and nonmagnetic-metal (= Al, Ti, Ta, Cu, Ag) layers prepared with double targets dc magnetron sputtering. The Fe/Al film with thin δFe exh...

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Veröffentlicht in:Journal of the Magnetics Society of Japan 1991, Vol.15(S_2_PMRC_91), pp.S2_75-80
Hauptverfasser: HAEIWA, Tetsuji, NEGORO, Hideto, MATSUMOTO, Mitsunori
Format: Artikel
Sprache:eng
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Zusammenfassung:This paper presents experimental studies of soft magnetic properties and thermal stabilities for compositionally modulated multilayer films consisting of pure Fe and nonmagnetic-metal (= Al, Ti, Ta, Cu, Ag) layers prepared with double targets dc magnetron sputtering. The Fe/Al film with thin δFe exhibited a high permeability and maintained its high permeability up to 40 MHz, because of its high resistivity (≈ 78μΩcm). The Fe/Al and Fe/Ag films maintained their magnetic softness after annealing up to 300 °C.
ISSN:0285-0192
1880-4004
DOI:10.3379/jmsjmag.15.S2_75