Co-O PERPENDICULAR MAGNETIC FILMS PREPARED BY REEACTlVE EVAPORATION WITH THE SUPPLY OF OXYGEN-NITROGEN MIXTURE GAS

We have looked for a production method of perpendicular magnetic media which uses cheaper materials and can be used in mass production. Consequently, we found a new method for obtaining partially oxidized Fe, Co perpendicular magnetic anisotropy films. These films are prepared by reactive evaporation with a supply gas whose composition is like air. Magnetic films obtained by this method have clear columnars which are perpendicularly oriented to the substrate and which are separated by the voids. Furthermore, films' cracks were extremely reduced.