THE MAGNETIC ANISOTROPY AND COLUMNAR STRUCTURE OF OBLIQUELY SPUTTERED Co-Cr FILMS

The shape magnetic anisotropy contribution for Co-Cr films, which were normally and obliquely magnetron sputtered was studied. Both Co-Cr films deposited by atoms from one line source and from two line sources showed a columnar structure, and the inclination angle of the column approximately coincided with the angle of the incident beam angle. From the torque curve analysis, magnetocrystalline anisotropy was found to play a principal part in the magnetic anisotropy of Co-Cr films deposited using two line sources. However, in the case of the Co-Cr film sputtered by one line source, not only magnetocrystalline anisotropy but shape magnetic anisotropy due to the columnar structure played an important role in determining the magnetic properties of Co-Cr films.