AUTOMATIC MEASUREMENT SYSTEM OF VELOCTY DISTRIBUTION IN CLEAN ROOM BY 3-DIMENSIONAL ULTRA SONIC ANEMOMETERS

AUTOMATIC MEASUREMENT SYSTEM OF VELOCTY DISTRIBUTION IN CLEAN ROOM BY 3-DIMENSIONAL ULTRA SONIC ANEMOMETERS

We developed automatic data acquisition system in order to visualize velocity distribution in clean room using 3-dimensionai ultra sonic anemometer. The probes of the anemometers can be set in any mesuring point by the robot with wireless operation. Acquired data are transfered from the anemometers...

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Veröffentlicht in:JOURNAL OF THE FLOW VISUALIZATION SOCIETY OF JAPAN 1987/10/05, Vol.7(Supplement), pp.97-100
Hauptverfasser: SETA, SHIGEYUKI, SUGAWARA, ZIN, YABUSHITA, MITURU, HARA, YOSHIO, OKA, TOSHIHIRO, URABE, MACHIKA
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Sprache:jpn
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Zusammenfassung:We developed automatic data acquisition system in order to visualize velocity distribution in clean room using 3-dimensionai ultra sonic anemometer. The probes of the anemometers can be set in any mesuring point by the robot with wireless operation. Acquired data are transfered from the anemometers to the computer by RS232C wireless MODEM and the averaged velocities of X, Y, Z components are calculated and outputed on CRT or to the plotter.
ISSN:0287-3605
1884-0361
DOI:10.3154/jvs1981.7.Supplement_97