Large-Area Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma CVD

Large-area synthesis of well-aligned carbon nanotubes (CNTs) by surface-wave-excited microwave-plasma chemical vapor deposition (CVD) using slot antennas has been developed. By a one-slot antenna system, aligned CNTs were successfully synthesized on a 3 × 3 cm2 substrate. In order to synthesize on a...

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Veröffentlicht in:	SHINKU 2003/03/20, Vol.46(3), pp.249-252
Hauptverfasser:	HAYASHI, Hiroyuki, KOGA, Mizuho, KASHIRAJIMA, Jun, TAKAHASHI, Kazumasa, HAYASHI, Yasuaki, NISHINO, Shigehiro
Format:	Artikel
Sprache:	eng ; jpn
Online-Zugang:	Volltext
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