Large-Area Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma CVD

Large-area synthesis of well-aligned carbon nanotubes (CNTs) by surface-wave-excited microwave-plasma chemical vapor deposition (CVD) using slot antennas has been developed. By a one-slot antenna system, aligned CNTs were successfully synthesized on a 3 × 3 cm2 substrate. In order to synthesize on a larger-area substrate, we generated large-area surface-wave-plasma by a two-slot antenna system and synthesized CNTs on substrates set at the center and around the edge of a 7.5 × 7.5 cm2 substrate holder. Grown CNTs were aligned and uniform in diameter and density. Surface-wave excited microwave-plasma CVD has a potential for large-area synthesis of well-aligned carbon nanotubes.