Large-Area Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma CVD

Large-Area Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma CVD

Large-area synthesis of well-aligned carbon nanotubes (CNTs) by surface-wave-excited microwave-plasma chemical vapor deposition (CVD) using slot antennas has been developed. By a one-slot antenna system, aligned CNTs were successfully synthesized on a 3 × 3 cm2 substrate. In order to synthesize on a...

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Veröffentlicht in:SHINKU 2003/03/20, Vol.46(3), pp.249-252
Hauptverfasser: HAYASHI, Hiroyuki, KOGA, Mizuho, KASHIRAJIMA, Jun, TAKAHASHI, Kazumasa, HAYASHI, Yasuaki, NISHINO, Shigehiro
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container_end_page 252
container_issue 3
container_start_page 249
container_title SHINKU
container_volume 46
creator HAYASHI, Hiroyuki
KOGA, Mizuho
KASHIRAJIMA, Jun
TAKAHASHI, Kazumasa
HAYASHI, Yasuaki
NISHINO, Shigehiro
description Large-area synthesis of well-aligned carbon nanotubes (CNTs) by surface-wave-excited microwave-plasma chemical vapor deposition (CVD) using slot antennas has been developed. By a one-slot antenna system, aligned CNTs were successfully synthesized on a 3 × 3 cm2 substrate. In order to synthesize on a larger-area substrate, we generated large-area surface-wave-plasma by a two-slot antenna system and synthesized CNTs on substrates set at the center and around the edge of a 7.5 × 7.5 cm2 substrate holder. Grown CNTs were aligned and uniform in diameter and density. Surface-wave excited microwave-plasma CVD has a potential for large-area synthesis of well-aligned carbon nanotubes.
doi_str_mv 10.3131/jvsj.46.249
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title Large-Area Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma CVD
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