Negative Ion Beams and Plasmas. A New Machine for Materials Synthesis Using Positive and Negative Ion Deposition
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| Veröffentlicht in: | SHINKU 1995, Vol.38 (11), p.929-934 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng ; jpn |
| Online-Zugang: | Volltext |
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| container_end_page | 934 |
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| container_issue | 11 |
| container_start_page | 929 |
| container_title | SHINKU |
| container_volume | 38 |
| creator | FUJII, Kanenaga HORINO, Yuji TSUBOUCHI, Nobuteru CHAYAHARA, Akiyoshi KINOMURA, Atsushi |
| description | |
| doi_str_mv | 10.3131/jvsj.38.929 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0559-8516 |
| ispartof | SHINKU, 1995, Vol.38 (11), p.929-934 |
| issn | 0559-8516 1880-9413 |
| language | eng ; jpn |
| recordid | cdi_crossref_primary_10_3131_jvsj_38_929 |
| source | J-STAGE (Japan Science & Technology Information Aggregator, Electronic) Freely Available Titles - Japanese |
| title | Negative Ion Beams and Plasmas. A New Machine for Materials Synthesis Using Positive and Negative Ion Deposition |
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