Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)

Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)

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Veröffentlicht in:SHINKU 1991/07/20, Vol.34(7), pp.601-604
Hauptverfasser: IN, Sang Ryul, TAKAHASHI, Sunao, DAIBO, Hidemi, MARUYAMA, Takashi, YOKOUCHI, Shigeru, BE, Suck Hee
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container_end_page 604
container_issue 7
container_start_page 601
container_title SHINKU
container_volume 34
creator IN, Sang Ryul
TAKAHASHI, Sunao
DAIBO, Hidemi
MARUYAMA, Takashi
YOKOUCHI, Shigeru
BE, Suck Hee
description
doi_str_mv 10.3131/jvsj.34.601
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fullrecord <record><control><sourceid>jstage_cross</sourceid><recordid>TN_cdi_crossref_primary_10_3131_jvsj_34_601</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>article_jvsj1958_34_7_34_7_601_article_char_en</sourcerecordid><originalsourceid>FETCH-LOGICAL-c2701-44d311638ace210e7e88176ede3440016b997509f0a41c262dc3d6cba4a438673</originalsourceid><addsrcrecordid>eNo9kN9LwzAQx4MoOOae_AfyqEhnrknT9FGmm4OBsDlfyzVNZ8ZMR9IN5l9vu8pe7sf3PnccX0LugY05cHjeHsN2zMVYMrgiA1CKRZkAfk0GLEmySCUgb8koBFswzgVjiUgGBFfGBdvYo21OdII7W3hsbO1oXdF57exv383wsDGBVrWnX-htfQitFFplHazbUKSrvXWuK5d100Jnnj6slrPHO3JT4S6Y0X8ekvX07XPyHi0-ZvPJyyLSccogEqLkAJIr1CYGZlKjFKTSlIaL9lmQRZalCcsqhgJ0LONS81LqAgUKrmTKh-Spv6t9HYI3Vb739gf9KQeWdwblnUE5F3lrUEu_9vQ2NLgxFxZ9Y_XOnFnIEtXxaR_atctYf6PPjeN_ehxw8A</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)</title><source>J-STAGE Free</source><creator>IN, Sang Ryul ; TAKAHASHI, Sunao ; DAIBO, Hidemi ; MARUYAMA, Takashi ; YOKOUCHI, Shigeru ; BE, Suck Hee</creator><creatorcontrib>IN, Sang Ryul ; TAKAHASHI, Sunao ; DAIBO, Hidemi ; MARUYAMA, Takashi ; YOKOUCHI, Shigeru ; BE, Suck Hee</creatorcontrib><identifier>ISSN: 0559-8516</identifier><identifier>EISSN: 1880-9413</identifier><identifier>DOI: 10.3131/jvsj.34.601</identifier><language>eng</language><publisher>The Vacuum Society of Japan</publisher><ispartof>Shinku, 1991/07/20, Vol.34(7), pp.601-604</ispartof><rights>The Vacuum Society of Japan</rights><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,777,781,1877,4010,27904,27905,27906</link.rule.ids></links><search><creatorcontrib>IN, Sang Ryul</creatorcontrib><creatorcontrib>TAKAHASHI, Sunao</creatorcontrib><creatorcontrib>DAIBO, Hidemi</creatorcontrib><creatorcontrib>MARUYAMA, Takashi</creatorcontrib><creatorcontrib>YOKOUCHI, Shigeru</creatorcontrib><creatorcontrib>BE, Suck Hee</creatorcontrib><title>Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)</title><title>SHINKU</title><addtitle>J. Vac. Soc. Jpn.</addtitle><issn>0559-8516</issn><issn>1880-9413</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1991</creationdate><recordtype>article</recordtype><recordid>eNo9kN9LwzAQx4MoOOae_AfyqEhnrknT9FGmm4OBsDlfyzVNZ8ZMR9IN5l9vu8pe7sf3PnccX0LugY05cHjeHsN2zMVYMrgiA1CKRZkAfk0GLEmySCUgb8koBFswzgVjiUgGBFfGBdvYo21OdII7W3hsbO1oXdF57exv383wsDGBVrWnX-htfQitFFplHazbUKSrvXWuK5d100Jnnj6slrPHO3JT4S6Y0X8ekvX07XPyHi0-ZvPJyyLSccogEqLkAJIr1CYGZlKjFKTSlIaL9lmQRZalCcsqhgJ0LONS81LqAgUKrmTKh-Spv6t9HYI3Vb739gf9KQeWdwblnUE5F3lrUEu_9vQ2NLgxFxZ9Y_XOnFnIEtXxaR_atctYf6PPjeN_ehxw8A</recordid><startdate>1991</startdate><enddate>1991</enddate><creator>IN, Sang Ryul</creator><creator>TAKAHASHI, Sunao</creator><creator>DAIBO, Hidemi</creator><creator>MARUYAMA, Takashi</creator><creator>YOKOUCHI, Shigeru</creator><creator>BE, Suck Hee</creator><general>The Vacuum Society of Japan</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>1991</creationdate><title>Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)</title><author>IN, Sang Ryul ; TAKAHASHI, Sunao ; DAIBO, Hidemi ; MARUYAMA, Takashi ; YOKOUCHI, Shigeru ; BE, Suck Hee</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c2701-44d311638ace210e7e88176ede3440016b997509f0a41c262dc3d6cba4a438673</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1991</creationdate><toplevel>online_resources</toplevel><creatorcontrib>IN, Sang Ryul</creatorcontrib><creatorcontrib>TAKAHASHI, Sunao</creatorcontrib><creatorcontrib>DAIBO, Hidemi</creatorcontrib><creatorcontrib>MARUYAMA, Takashi</creatorcontrib><creatorcontrib>YOKOUCHI, Shigeru</creatorcontrib><creatorcontrib>BE, Suck Hee</creatorcontrib><collection>CrossRef</collection><jtitle>SHINKU</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>IN, Sang Ryul</au><au>TAKAHASHI, Sunao</au><au>DAIBO, Hidemi</au><au>MARUYAMA, Takashi</au><au>YOKOUCHI, Shigeru</au><au>BE, Suck Hee</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)</atitle><jtitle>SHINKU</jtitle><addtitle>J. Vac. Soc. Jpn.</addtitle><date>1991</date><risdate>1991</risdate><volume>34</volume><issue>7</issue><spage>601</spage><epage>604</epage><pages>601-604</pages><issn>0559-8516</issn><eissn>1880-9413</eissn><pub>The Vacuum Society of Japan</pub><doi>10.3131/jvsj.34.601</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record>
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recordid cdi_crossref_primary_10_3131_jvsj_34_601
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title Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-19T05%3A26%3A04IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-jstage_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Sensitivity%20Calibration%20of%20Ionization%20Gauges%20for%20Various%20Gases%20Using%20a%20Spinning%20Rotor%20Gauge%20(SRG)&rft.jtitle=SHINKU&rft.au=IN,%20Sang%20Ryul&rft.date=1991&rft.volume=34&rft.issue=7&rft.spage=601&rft.epage=604&rft.pages=601-604&rft.issn=0559-8516&rft.eissn=1880-9413&rft_id=info:doi/10.3131/jvsj.34.601&rft_dat=%3Cjstage_cross%3Earticle_jvsj1958_34_7_34_7_601_article_char_en%3C/jstage_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true