Effect of Changes in Thermophysical Properties of Molybdenum Thin Films on Laser Ablation Process

The effect of changes in thermophysical properties of a molybdenum film under sacrificial oxide process with laser ablation on the size effect of track formation is studied by numerical simulation. The hypothesis explaining the decrease in the track width in the film ablation zone compared to the effective diameter of the laser beam is refined. It is shown that a specific change in the thermal conductivity of a substance during oxidation significantly affects the distribution of temperature field, which is expressed in the narrowing of the characteristics of the temperature distribution over the film surface, which was not previously considered. It is found that changes in the density, specific heat capacity, and thermal effect of the chemical reaction of molybdenum oxidation during film oxidation do not significantly affect the temperature distribution in the laser beam zone.