Physical characteristics of molybdenum films deposited by magnetron sputtering on perlite glass-ceramic substrates

The results of the study of physical characteristics of molybdenum films deposited by magnetron sputtering on the perlite glass-ceramic substrates in an argon environment are presented. It is found that the films prepared at the substrate temperatures higher than 250°C have good adhesion and the bonding strength is more than 30 MPa. Under optimal deposition conditions, the obtained films have a high degree of texturing with the crystallite sizes about 100 nm and have the relatively low resistivity (5×10 −4 Ω cm) at low deposition rate; they can be used as a bottom contact for thin film solar cells based on the copper multicomponent compounds with the chalcopyrite structure.