Synthesis of carbon films by magnetron sputtering of a graphite target using hydrogen as plasma-forming gas

During magnetron sputtering of graphite using hydrogen as plasma-forming gas, a material sputtered from the target deposited only on heated substrates. When using currentheated Ni-Fe foils as substrates, carbon deposits of different crystal structures were obtained. The conditions for growing single...

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Veröffentlicht in:	Bulletin of the Lebedev Physics Institute 2011-09, Vol.38 (9), p.263-266
Hauptverfasser:	Yurkov, A. N., Melnik, N. N., Sychev, V. V., Savranskii, V. V., Vlasov, D. V., Konov, V. I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Physics Physics and Astronomy
Online-Zugang:	Volltext
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