Effect of the deposition parameters on the phase–structure state, hardness, and tribological characteristics of Mo2N/CrN vacuum–arc multilayer coatings

A complex study has been performed of the effect of the technological parameters, which are responsible for the energy states of deposited particles, on the elemental, phase and structure compositions, hardness, and tribological characteristics of formed vacuum–arc multilayer Mo 2 N/CrN systems with a nanometric thickness. The formation of two phase and structure types has been defined in combined nitride layers: γ-Mo 2 N/CrN with the isostructural cubic crystalline lattices and γ-Mo 2 N/CrN with non-isostructural cubic and hexagonal lattices.