A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm

An original stand for a nanolithographer-multiplicator with an operating wavelength of 13.5 nm and a design spatial resolution of 30 nm has been developed in Russia at the Institute for Physics of Microstructures, Russian Academy of Sciences. A detailed description of basic principles and approaches...

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Veröffentlicht in:	Bulletin of the Russian Academy of Sciences. Physics 2011, Vol.75 (1), p.49-52
Hauptverfasser:	Volgunov, D. G., Zabrodin, I. G., Zakalov, B. A., Zuev, S. Yu, Kas’kov, I. A., Kluenkov, E. B., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Suslov, L. A., Toropov, M. N., Chkhalo, N. I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Hadrons Heavy Ions Nuclear Physics Physics Physics and Astronomy Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2010”
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	An original stand for a nanolithographer-multiplicator with an operating wavelength of 13.5 nm and a design spatial resolution of 30 nm has been developed in Russia at the Institute for Physics of Microstructures, Russian Academy of Sciences. A detailed description of basic principles and approaches used when constructing the stand and its key elements is given. The experiments planned to be performed using the stand are discussed.
ISSN:	1062-8738 1934-9432
DOI:	10.3103/S1062873811010278