Zirconia-based solid solutions—New materials of photoelectronics

Prospects of application of zirconia- and hafhia-based solid solutions for development of new generation of photodetectors are considered. The directions of photoelectronics, in which these materials successfully can become alternative to conventional dielectrics, are defined. A number of technologies of deposition and etching of zirconium dioxide and fianite layers were approbated and optimum ones were chosen. Photosensitive structures with fianite and ZrO 2 layers were produced.