$Fraunhofer diffraction on a polygon and calculation of binary mask images$

Fraunhofer diffraction on a polygon and calculation of binary mask images

A simple analytical formula for the spectrum of spatial harmonic components of a diffracted field is derived. It is used for construction of an effective algorithm of image calculation in photolithography.

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Bibliographische Detailangaben
Veröffentlicht in:	Moscow University physics bulletin 2009-04, Vol.64 (2), p.146-148
Hauptverfasser:	Belokopytov, G. V., Ryzhikova, Yu. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Mathematical and Computational Physics Physics Physics and Astronomy Theoretical
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	A simple analytical formula for the spectrum of spatial harmonic components of a diffracted field is derived. It is used for construction of an effective algorithm of image calculation in photolithography.
ISSN:	0027-1349 1934-8460
DOI:	10.3103/S0027134909020106