Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells

Photovoltaics offer a sustainable solution for the growing energy needs of the world, while reducing environmental impact. Transparent Conductive Oxides (TCOs), which are essential in photovoltaic technology, offer high light transmittance and effective charge carrier extraction. This research focuses on the impact of oxygen (O2) flow rates in the deposition of indium tin oxide (ITO) films on n-type crystalline silicon (c-Si) substrates by DC magnetron sputtering. The structural, optical, and electrical properties were analyzed. Based on the results, the optimal O2 ratio was determined and used in the fabrication of SHJ solar cells, achieving an efficiency of 18.6%.