A review on monolithic 3D integration: From bulk semiconductors to low-dimensional materials

A review on monolithic 3D integration: From bulk semiconductors to low-dimensional materials

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Veröffentlicht in:Nano research 2024-12
Hauptverfasser: Hu, Ziying, Li, Hongtao, Zhang, Mingdi, Jin, Zeming, Li, Jixiang, Fu, Wenku, Dai, Yunyun, Huang, Yuan, Liu, Xia, Wang, Yeliang
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container_title Nano research
container_volume
creator Hu, Ziying
Li, Hongtao
Zhang, Mingdi
Jin, Zeming
Li, Jixiang
Fu, Wenku
Dai, Yunyun
Huang, Yuan
Liu, Xia
Wang, Yeliang
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doi_str_mv 10.26599/NR.2025.94907225
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1998-0000
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title A review on monolithic 3D integration: From bulk semiconductors to low-dimensional materials
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