Numerical Modeling of Axisymmetric and Three-Dimensional Flows in Microelectromechanical Systems Nozzles

Numerical Modeling of Axisymmetric and Three-Dimensional Flows in Microelectromechanical Systems Nozzles

Both continuum and kinetic approaches were used in a numerical study of three-dimensional effects on the performance of a micronozzle fabricated from flat silicon wafers.

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Bibliographische Detailangaben
Veröffentlicht in:AIAA journal 2002-05, Vol.40 (5), p.897-904
Hauptverfasser: Alexeenko, Alina A, Levin, Deborah A, Gimelshein, Sergey F, Collins, Robert J, Reed, Brian D
Format: Artikel
Sprache:eng
Schlagworte:
Accommodation
Aerodynamics
Applied fluid mechanics
Computer simulation
Continuum mechanics
Error analysis
Exact sciences and technology
Fluid dynamics
Fluidics
Fundamental areas of phenomenology (including applications)
Kinetic theory
Mathematical models
Nozzles
Physics
Rarefied gas dynamics
Reynolds number
Shear walls
Silicon wafers
Viscous flow
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Beschreibung
Zusammenfassung:Both continuum and kinetic approaches were used in a numerical study of three-dimensional effects on the performance of a micronozzle fabricated from flat silicon wafers.
ISSN:0001-1452
1533-385X
DOI:10.2514/2.1726