The Photopolymer Science and Technology Award

The Photopolymer Science and Technology Award No. 232100, the Best Paper Award 2022, was presented to Nakamoto, Atsunori, Yamakawa, Shinji, Harada, Tetsuo, and Watanabe, Takeo (Center for EUV Lithography, Laboratory of Advanced Science and Technology for Industry, University of Hyogo) for their outs...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2023/06/15, Vol.36(1), pp.7-10
Hauptverfasser:	Nakamoto, Atsunori, Yamakawa, Shinji, Harada, Tetsuo, Watanabe, Takeo
Format:	Artikel
Sprache:	eng
Schlagworte:	The Photopolymer Science and Technology Award
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	The Photopolymer Science and Technology Award No. 232100, the Best Paper Award 2022, was presented to Nakamoto, Atsunori, Yamakawa, Shinji, Harada, Tetsuo, and Watanabe, Takeo (Center for EUV Lithography, Laboratory of Advanced Science and Technology for Industry, University of Hyogo) for their outstanding contribution published in Journal of Photopolymer Science and Technology, 35, (2022) 61-65, entitled “Grazing-Incidence Soft-X-ray Scattering for the Chemical Structure Size Distribution Analysis in EUV Resist”.
ISSN:	0914-9244 1349-6336
DOI:	10.2494/photopolymer.36.7