Study on Fabrication of X-ray Collimators by X-ray Lithography Using Synchrotron Radiation

X-ray lithography using synchrotron radiation enables the microfabrication of plastic solid materials in scale from micrometers to millimeters with high aspect and nanoscale surface roughness. We investigate fabrication of X-ray collimator mold for the space telescope using the X-ray lithography. A...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2021/06/11, Vol.34(2), pp.213-218
Hauptverfasser:	Saegusa, Shunya, Narukage, Noriyuki, Utsumi, Yuichi, Yamaguchi, Akinobu
Format:	Artikel
Sprache:	eng
Schlagworte:	LIGA Microfabrication Synchrotron radiation X-ray
Online-Zugang:	Volltext
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