Study on Fabrication of X-ray Collimators by X-ray Lithography Using Synchrotron Radiation

X-ray lithography using synchrotron radiation enables the microfabrication of plastic solid materials in scale from micrometers to millimeters with high aspect and nanoscale surface roughness. We investigate fabrication of X-ray collimator mold for the space telescope using the X-ray lithography. A honeycomb-like structure consisting of hexagonal columns with diameter of several hundred micrometers is required for the X-ray collimator. In this study, target resin molds for manufacturing a metallic X-ray collimator were created from polymethyl methacrylate (PMMA) substrate. We succeeded in producing a honeycomb pillar array structure with diagonal length of 100 µm and its distance of 14.1 µm between pillars.