The Photopolymer Science and Technology Award

The Photopolymer Science and Technology Award

The Photopolymer Science and Technology Award No. 062100, the Best Paper Award 2006, was presented to Maenhoudt, Mireille, Vandenberghe, Geert, Ercken, Monique, Cheng, Shaunee, Leunissen, Peter and Ronse, Kurt, all from IMEC, for their outstanding contribution published in Journal of Photopolymer Sc...

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Veröffentlicht in:Journal of Photopolymer Science and Technology 2006, Vol.19(1), pp.5-8
Hauptverfasser: Maenhoudt, Mireille, Vandenberghe, Geert, Ercken, Monique, Cheng, Shaunee, Leunissen, Peter, Ronse, Kurt
Format: Artikel
Sprache:eng
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Zusammenfassung:The Photopolymer Science and Technology Award No. 062100, the Best Paper Award 2006, was presented to Maenhoudt, Mireille, Vandenberghe, Geert, Ercken, Monique, Cheng, Shaunee, Leunissen, Peter and Ronse, Kurt, all from IMEC, for their outstanding contribution published in Journal of Photopolymer Science and Technology 18(5), 571-577 (2005), entitled "Opportunities and Challenges in Immersion Lithography".
ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.19.5