The Impact of Fluoropolymers on Line Edge Roughness in 193nm Imaging
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| Veröffentlicht in: | Journal of photopolymer science and technology 2005, Vol.18 (4), p.467-469 |
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| container_end_page | 469 |
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| container_issue | 4 |
| container_start_page | 467 |
| container_title | Journal of photopolymer science and technology |
| container_volume | 18 |
| creator | Zumsteg, F. C. Leffew, K. W. Feiring, A. E. Crawsfored, M. K. Fahnham, W. B. Petrov, V. A. Schadt III, 1 Tran, H. V. |
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| doi_str_mv | 10.2494/photopolymer.18.467 |
| format | Article |
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| ispartof | Journal of photopolymer science and technology, 2005, Vol.18 (4), p.467-469 |
| issn | 0914-9244 1349-6336 |
| language | eng |
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| source | J-STAGE Free; Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; Free Full-Text Journals in Chemistry |
| title | The Impact of Fluoropolymers on Line Edge Roughness in 193nm Imaging |
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