Six Degree-of-Freedom Fine motion Mechanism using Parallel Mechanism (2nd Report): Performance Test

This study proposes a six-degree-of-freedom fine motion mechanism with isotropic stiffness and positioning resolution in XYZ directions. In the previous report, the optimum link layouts with the above characteristics have been designed by the singular value decomposition. In this paper, construction and experimental results have been described for the designed parallel mechanism. The stiffness values in translational directions and in aβ directions became equal. The stiffness value in γ direction, moreover, was two times those in γβ directions. The maximum movements of the stage were 10μm in XYZ directions. 200μrad in aβ directions and 100μrad in γ direction. The positioning errors and the motion errors were less than ±0.08βm and ±l.0μrad. The dynamic characteristics in six directions were equal under 1-50Hz frequency range.