Development of a Micro-step XY.THETA. Stage Using Piezoelectric Tube Actuators

Development of a Micro-step XY.THETA. Stage Using Piezoelectric Tube Actuators

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Veröffentlicht in:Seimitsu Kōgakkaishi 1994, Vol.60 (12), p.1736-1740
Hauptverfasser: Hara, Sigeji, Iyoki, Masato, Kaneko, Reizo, Matsuda, Ryuichi, Itao, Kiyoshi
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Sprache:jpn
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container_end_page 1740
container_issue 12
container_start_page 1736
container_title Seimitsu Kōgakkaishi
container_volume 60
creator Hara, Sigeji
Iyoki, Masato
Kaneko, Reizo
Matsuda, Ryuichi
Itao, Kiyoshi
description
doi_str_mv 10.2493/jjspe.60.1736
format Article
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title Development of a Micro-step XY.THETA. Stage Using Piezoelectric Tube Actuators
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