Development of a Vibration Suppression GUI Tool Based on Input Preshaping and its Application to Semiconductor Wafer Transfer Robot

Development of a Vibration Suppression GUI Tool Based on Input Preshaping and its Application to Semiconductor Wafer Transfer Robot

Speed up movement to increase productivity may cause problems such as vibration. The tool we propose to suppress vibration is based on input preshaping, and its visual graphical user interface makes it easy to use. Testing of the tool at high speed suppressing vibration in a semiconductor wafer tran...

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Veröffentlicht in:International journal of automation technology 2008-11, Vol.2 (6), p.479-485
Hauptverfasser: Duong, Minh Duc, Terashima, Kazuhiko, Kamigaki, Toshio, Kawamura, Hirotoshi
Format: Artikel
Sprache:eng
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Zusammenfassung:Speed up movement to increase productivity may cause problems such as vibration. The tool we propose to suppress vibration is based on input preshaping, and its visual graphical user interface makes it easy to use. Testing of the tool at high speed suppressing vibration in a semiconductor wafer transfer robot confirmed the feasibility of our proposal.
ISSN:1881-7629
1883-8022
DOI:10.20965/ijat.2008.p0479