10.4L: Late-News Paper: Joule Heating Induced Lift-off Technology for Large Area Flexible AMOLED Displays

For large area flexible active matrix organic light emitting diode AMOLED display, we have developed a novel lift off method. This novel technology named as Joule heating induced lift‐off JILO uses pulsed electric field for debonding of plastic and the substrate glass. We fabricated the low temperat...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2011-06, Vol.42 (1), p.118-120
Hauptverfasser: Ko, Moo-Voon, Im, Choong-youl, Lee, Iljeong, Lee, Jong-hyuk, Kim, Sungchul, Hong, Won-Eui, Ro, Jae-Sang
Format: Artikel
Sprache:eng
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Zusammenfassung:For large area flexible active matrix organic light emitting diode AMOLED display, we have developed a novel lift off method. This novel technology named as Joule heating induced lift‐off JILO uses pulsed electric field for debonding of plastic and the substrate glass. We fabricated the low temperature poly silicon LTPS thin film transistors TFTs on the plastic film. Applying JILO, we can successfully develop flexible TFTs with no damage on transistor performance
ISSN:0097-966X
2168-0159
DOI:10.1889/1.3621040