46.2: Organic Deposition Methods for AM-OLED by Using Compact Linear Nozzle Source (CLNS) and Hybrid Source
We have developed the Compact Linear Nozzle Source (CLNS). Scanning deposition method with CLNS provides the solution which keeps high material efficiency of linear source, while solving problems concerning linear source. And Hybrid Source, which is comprised of CLNS and point source, will be the be...
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Veröffentlicht in: | SID International Symposium Digest of technical papers 2010-05, Vol.41 (1), p.692-694 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | We have developed the Compact Linear Nozzle Source (CLNS). Scanning deposition method with CLNS provides the solution which keeps high material efficiency of linear source, while solving problems concerning linear source. And Hybrid Source, which is comprised of CLNS and point source, will be the best OLED evaporation system that boasts excellent co‐deposition homogeneity. |
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ISSN: | 0097-966X 2168-0159 |
DOI: | 10.1889/1.3500562 |