56.3: High Corrosion Resistance Mo Alloy for TFT-LCD and Touch Screen Panel Metallization
A new Molybdenum‐based alloy with high resistance against corrosion and oxidation was developed for TFT display and touch screen panel metallization. Highly environmentally stable alloy films with low resistivity and low film stress were made by DC magnetron sputtering. The oxide passivation layer w...
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| Veröffentlicht in: | SID International Symposium Digest of technical papers 2009-06, Vol.40 (1), p.842-845 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A new Molybdenum‐based alloy with high resistance against corrosion and oxidation was developed for TFT display and touch screen panel metallization. Highly environmentally stable alloy films with low resistivity and low film stress were made by DC magnetron sputtering. The oxide passivation layer was characterized by photoelectron spectroscopy (XPS). |
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| ISSN: | 0097-966X 2168-0159 |
| DOI: | 10.1889/1.3256925 |