P-199L: Late-News Poster: Development of Large-Sized AMOLED Manufacturing System

We have developed a system for manufacturing large‐Sized AMOLED devices which can scan sources or a substrate to produce WOLED or full‐colored OLED alternatively. We also have developed a valved organic evaporation source for 4th to 5th generation substrate which enables shutoff during idling time and open process time only. So we could improve the efficiency of material utilization up to 52% with maintaining 2.5% of non‐uniformity within 1100*1300mm2 substrate. We expect this source and system can improve performance and reduce the CoO (Cost of Operation).