P-185L: Late-News Poster: Direct Patterning of Metal Electrodes for TFT-LCD Fabrication

We have analyzed a metal direct printing method using roll printing technology for the low cost process in TFT‐LCD fabrication. The silver metal electrodes patterned down to 3 μm in space width between lines were directly printed by this method. Very low line resistivity of 4.5 μΩ⋅cm was obtained, which is comparable to that of the AlNd metal alloy for the gate electrode of TFT‐LCD. Furthermore, we evaluated the transfer characteristics of an a‐Si:H TFT using directly printed silver material as a gate line.