6.2: Mechanical Properties of Jade™ Glass Substrate for LTPS Application

Mechanical properties of Jade™ glass substrate, including ring‐on‐ring strength of surfaces, vertical bend strength of ground edges, dynamic fatigue constant, fracture toughness, and Young's modulus, are presented. This high strain point glass is designed to meet low compaction requirement for low temperature polysilicon process (LTPS). Its fusion surface quality ensures pristine surfaces with high strength. Its superior edge finish leads to high edge strength. Its composition and manufacturing process eliminate the need for post‐forming thermal treatment. Its intrinsic thermal stability minimizes viscous distortion during LTPS processing. Its fracture toughness is similar to that of a‐Si glasses, yet its fatigue resistance is superior due, primarily, to its composition.