P-70: Improvement of Material Utilization of Organic Evaporation Source for Manufacturing Large-Sized AMOLED Devices

We have developed a valved organic evaporation source for 4th generation substrate (730*920mm2) which enables shutoff during idling time and open process time only. So we could improve the efficiency of material utilization dramatically compared with conventional sources such as point sources or linear sources. Generally, linear source is longer than width of substrate and it makes material consumed so much. However, a valved source we developed is designed shorter than width of substrate to save material by preventing unnecessary flux out warding the substrate. In addition, it is comprised of 5 individual nozzles which have many holes in order to achieve the desired uniformity. As a result, we could obtain 30% of material utilization and 5% of non‐uniformity for a 730mm wide substrate. We expect this source can improve performance and reduce the COO (Cost of Operation).