68.2: 3.5 Inch QCIF+ AM-OLED Panel Based on Oxide TFT Backplane
IGZO TFTs were fabricated on a glass substrate by conventional photo‐lithography and wet‐etching processes. The real mobility of our device was about 95 cm2/Vs and had very low dependence on the variation of W/L, channel length and channel width. An IGZO TFT array was also fabricated and a top emiss...
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Veröffentlicht in: | SID International Symposium Digest of technical papers 2007-05, Vol.38 (1), p.1826-1829 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | IGZO TFTs were fabricated on a glass substrate by conventional photo‐lithography and wet‐etching processes. The real mobility of our device was about 95 cm2/Vs and had very low dependence on the variation of W/L, channel length and channel width. An IGZO TFT array was also fabricated and a top emission OLED device was successfully driven by it. Therefore, the oxide TFT could be one of the promising candidates as a backplane for the OLED device. |
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ISSN: | 0097-966X 2168-0159 |
DOI: | 10.1889/1.2785691 |