31.3: Rapid Laser Patterning of ITO on Glass for Next Generation Plasma Display Panel Manufacture

31.3: Rapid Laser Patterning of ITO on Glass for Next Generation Plasma Display Panel Manufacture

Rapid Laser Patterning (RLP) of ITO on glass offers a cost effective alternative to wet‐etch lithography in the manufacture of PDPs. It is demonstrated that RLP can effectively pattern ITO to industrial standards. It is also shown that the process is rapid and has major cost benefits vs. lithography...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2007-05, Vol.38 (1), p.1209-1212
Hauptverfasser: Henry, Matt, Harrison, Paul M., Wendland, Jozef
Format: Artikel
Sprache:eng
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Zusammenfassung:Rapid Laser Patterning (RLP) of ITO on glass offers a cost effective alternative to wet‐etch lithography in the manufacture of PDPs. It is demonstrated that RLP can effectively pattern ITO to industrial standards. It is also shown that the process is rapid and has major cost benefits vs. lithography.
ISSN:0097-966X
2168-0159
DOI:10.1889/1.2785527